Microengineering, MEMS, and interfacing

Microengineering, MEMS, and interfacing

a practical guide

by Danny Banks
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MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications.

Along with this massive growth, the field is still experiencing growing pains as fabr.

First published
2006
Publishers
CRC/Taylor & Francis
Language
English

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